| Series | XE16x |
| Package | Tray |
| Part Status | Not For New Designs |
| Core Processor | C166SV2 |
| Core Size | 16-Bit |
| Speed | 66MHz |
| Connectivity | CANbus, EBI/EMI, I²C, LINbus, SPI, SSC, UART/USART, USI |
| Peripherals | I²S, POR, PWM, WDT |
| Number of I/O | 118 |
| Program Memory Size | 768KB (768K x 8) |
| Program Memory Type | FLASH |
| EEPROM Size | - |
| RAM Size | 82K x 8 |
| Voltage - Supply (Vcc/Vdd) | 3V ~ 5.5V |
| Data Converters | A/D 16x10b |
| Oscillator Type | Internal |
| Operating Temperature | -40°C ~ 85°C (TA) |
| Mounting Type | Surface Mount |
| Package / Case | 144-LQFP Exposed Pad |
| Supplier Device Package | 144-LQFP (20x20) |
