| Series | SAM3S |
| Package | Tray |
| Part Status | Active |
| Core Processor | ARM® Cortex®-M3 |
| Core Size | 32-Bit |
| Speed | 64MHz |
| Connectivity | I²C, IrDA, Memory Card, SPI, SSC, UART/USART, USB |
| Peripherals | Brown-out Detect/Reset, DMA, I²S, POR, PWM, WDT |
| Number of I/O | 47 |
| Program Memory Size | 512KB (512K x 8) |
| Program Memory Type | FLASH |
| EEPROM Size | - |
| RAM Size | 64K x 8 |
| Voltage - Supply (Vcc/Vdd) | 1.62V ~ 3.6V |
| Data Converters | A/D 10x10/12b; D/A 2x12b |
| Oscillator Type | Internal |
| Operating Temperature | -40°C ~ 85°C (TA) |
| Mounting Type | Surface Mount |
| Package / Case | 64-VFQFN Exposed Pad |
| Supplier Device Package | 64-QFN (9x9) |
