| Series | SAM L21E, Functional Safety (FuSa) |
| Package | Tape & Reel (TR)Cut Tape (CT)Digi-Reel® |
| Part Status | Active |
| Core Processor | ARM® Cortex®-M0+ |
| Core Size | 32-Bit |
| Speed | 48MHz |
| Connectivity | I²C, LINbus, SCI, SPI, UART/USART, USB |
| Peripherals | DMA, POR, PWM, WDT |
| Number of I/O | 25 |
| Program Memory Size | 64KB (64K x 8) |
| Program Memory Type | FLASH |
| EEPROM Size | - |
| RAM Size | 8K x 8 |
| Voltage - Supply (Vcc/Vdd) | 1.62V ~ 3.63V |
| Data Converters | A/D 10x12b; D/A 2x12b |
| Oscillator Type | Internal |
| Operating Temperature | -40°C ~ 105°C (TA) |
| Mounting Type | Surface Mount |
| Package / Case | 32-VFQFN Exposed Pad |
| Supplier Device Package | 32-VQFN (5x5) |
