| Series | SAM E51 |
| Package | Tray |
| Part Status | Active |
| Core Processor | ARM® Cortex®-M4F |
| Core Size | 32-Bit |
| Speed | 120MHz |
| Connectivity | CANbus, EBI/EMI, I²C, IrDA, LINbus, MMC/SD, QSPI, SPI, UART/USART, USB |
| Peripherals | Brown-out Detect/Reset, DMA, I²S, POR, PWM |
| Number of I/O | 37 |
| Program Memory Size | 256KB (256K x 8) |
| Program Memory Type | FLASH |
| EEPROM Size | - |
| RAM Size | 128K x 8 |
| Voltage - Supply (Vcc/Vdd) | 1.71V ~ 3.63V |
| Data Converters | A/D 20x12b; D/A 2x12b |
| Oscillator Type | Internal |
| Operating Temperature | -40°C ~ 85°C (TA) |
| Mounting Type | Surface Mount |
| Package / Case | 48-VFQFN Exposed Pad |
| Supplier Device Package | 48-VQFN (7x7) |
